Plasma etching system with stainless steel workspace of about 40x50x50 cm, 100 l, 8 trays water cooled (1l / min purified water), RF generator 13.56 MHz 500W (oxygen). 400V tri-phased. 32 A. Max 4KW. Entirely programmable with cycle program control, phase and parameters set by supplied PC. Pressure 0.1 - 2 mBar, in cupboard with castors. On castors. Suitable vacuum pump are available (not included)